The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 15, 2025
Filed:
Nov. 11, 2021
Hansol Chemical Co., Ltd., Seoul, KR;
Mi-Ra Park, Jeollabuk-do, KR;
Kyu-Hyun Yeom, Jeollabuk-do, KR;
Hyun-Kyung Lee, Jeollabuk-do, KR;
Jang-Hyun Seok, Sejong-si, KR;
Jung-Woo Park, Seoul, KR;
HANSOL CHEMICAL CO., LTD., Seoul, KR;
Abstract
The present disclosure relates to a compound capable of implementing thin film deposition through vapor deposition, and more particularly, to a rare earth compound which is applicable to atomic layer deposition (ALD) or chemical vapor deposition (CVD) and has excellent thermal stability and reactivity, a rare earth precursor containing the same, a method of preparing the same, and a method of forming a thin film using the same.
Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile