The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 08, 2025

Filed:

Aug. 10, 2023
Applicant:

Gigaphoton Inc., Tochigi, JP;

Inventor:

Keisuke Ishida, Oyama, JP;

Assignee:

Gigaphoton Inc., Tochigi, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S 3/134 (2006.01); G03F 7/00 (2006.01); G03F 7/20 (2006.01); H01S 3/038 (2006.01); H01S 3/13 (2006.01); H01S 3/225 (2006.01);
U.S. Cl.
CPC ...
H01S 3/134 (2013.01); G03F 7/2004 (2013.01); G03F 7/70025 (2013.01); G03F 7/7055 (2013.01); H01S 3/038 (2013.01); H01S 3/1305 (2013.01); H01S 3/225 (2013.01);
Abstract

A gas laser apparatus includes a laser oscillator including a pair of discharge electrodes disposed to face each other and configured to generate light from laser gas upon application of voltage, and a laser-side resonator in which the light resonates; an amplifier including an amplification unit and an amplification-side resonator; a beam splitter configured to reflect a part of the light from the laser-side resonator; an optical sensor configured to detect the light reflected by the beam splitter; and a processor configured to control the voltage based on an output from the optical sensor. The amplification-side resonator includes a rear mirror and an output coupling mirror. The laser-side resonator includes a grating and an output coupling mirror. The processor maintains the voltage at a constant value equal to or larger than a threshold of the voltage when the voltage is to be smaller than the threshold.


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