The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 08, 2025
Filed:
Sep. 16, 2022
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Assignee:
Tokyo Electron Limited, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01K 3/14 (2006.01); H01L 21/677 (2006.01); H01L 21/68 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67742 (2013.01); H01L 21/67766 (2013.01); H01L 21/68 (2013.01);
Abstract
A stage includes a base on which an object to be transported or tested is placed, four movable bodies configured to support the base in a manner so that the base can be raised and lowered, four driving motors, provided in correspondence with the four movable bodies, and configured to independently raise and lower the four movable bodies, respectively, four guides configured to guide the four movable bodies, respectively, and a support frame, having wall surfaces parallel to a raising and lowering direction of the base and continuous along a direction perpendicular to the raising and lowering direction of the base, and the four guides fixed to the wall surfaces.