The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 08, 2025
Filed:
Apr. 08, 2024
Applied Materials, Inc., Santa Clara, CA (US);
Yingdong Luo, Newark, CA (US);
Zhengping Yao, Cupertino, CA (US);
Daihua Zhang, Los Altos, CA (US);
David Alexander Sell, Santa Clara, CA (US);
Jingyi Yang, Santa Clara, CA (US);
Xiaopei Deng, San Jose, CA (US);
Kevin Messer, Mountain View, CA (US);
Samarth Bhargava, Saratoga, CA (US);
Rami Hourani, Santa Clara, CA (US);
Ludovic Godet, Sunnyvale, CA (US);
Applied Materials, Inc., Santa Clara, CA (US);
Abstract
Embodiments of the present disclosure generally relate to methods for forming a waveguide. Methods may include measuring a waveguide substrate, the waveguide having a substrate thickness distribution; and depositing an index-matched layer onto a surface of the waveguide, the index-matched layer having a first surface disposed on the waveguide substrate and a second surface opposing the first surface, wherein the index-matched layer is disposed only over a portion of the waveguide substrate, and a device slope of a second surface of the index-matched layer is substantially the same as the waveguide slope of the first surface of the waveguide.