The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 08, 2025

Filed:

Jun. 14, 2022
Applicants:

National Institute of Advanced Industrial Science and Technology, Tokyo, JP;

Toa Electric Industrial Co., Ltd., Tokyo, JP;

Inventors:

Kazuma Kurihara, Ibaraki, JP;

Ryohei Hokari, Ibaraki, JP;

Hiroaki Fukui, Tokyo, JP;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G02B 1/118 (2015.01); C03C 17/245 (2006.01);
U.S. Cl.
CPC ...
G02B 1/118 (2013.01); C03C 17/245 (2013.01); C03C 2217/213 (2013.01); C03C 2217/73 (2013.01); C03C 2218/156 (2013.01); G02B 2207/101 (2013.01);
Abstract

An antireflection structure comprising a transparent substrate having a plurality of holes with U-shaped or V-shaped cross-sectional shapes perpendicular to a flat surface portion and a metal oxide film disposed on the surface portion of the transparent substrate and in the space portions formed in an upward direction from the bottom portions of holes in the transparent substrate, wherein the average diameter of the openings of the holes is 50 nm to 300 nm, the average distance between the center points of openings of the adjacent holes is 100 nm to 400 nm, and the depth of each hole from the surface portion of the substrate is 80 nm to 250 nm; and the thickness of the metal oxide film disposed in each of the space portions increases as the depth of each of the holes becomes larger, thereby reducing the difference in depth between the holes from the uppermost surface portion of the metal oxide film disposed on the surface portion to the surface portions of the metal oxide films in the space portions.


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