The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 08, 2025
Filed:
May. 22, 2020
Asml Netherlands B.v., Veldhoven, NL;
Benjamin Andrew Sams, San Diego, CA (US);
Dietmar Uwe Herbert Trees, San Diego, CA (US);
Theodorus Wilhelmus Driessen, San Diego, CA (US);
Bob Rollinger, San Diego, CA (US);
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A fluid control device () includes a structure () defining a valve cavity, a first fluid port (), a second fluid port (), and a third fluid port () configured to be fluidly coupled to a hermetic interior () of a body; and a plunger valve () within the valve cavity and configured to move between first and second modes while maintaining the hermetic interior of the body. In the first mode, the plunger valve is open such that a first fluid flow path is open between the hermetic interior and the first fluid port and fluid is free to pass between the first fluid port and the hermetic interior. In the second mode, the plunger valve is closed such that the first fluid port is blocked from the hermetic interior by the plunger valve and a second fluid flow path is open between the hermetic interior and the second fluid port.