The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 08, 2025
Filed:
Oct. 16, 2020
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
David Fenwick, Los Altos, CA (US);
Jennifer Y. Sun, Fremont, CA (US);
Cheng-Hsuan Chou, Santa Clara, CA (US);
Xiao Ming He, Fremont, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/40 (2006.01); C23C 16/455 (2006.01); C23C 16/505 (2006.01); C23F 11/02 (2006.01); C23F 11/18 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45536 (2013.01); C23C 16/40 (2013.01); C23C 16/45529 (2013.01); C23C 16/45553 (2013.01); C23C 16/45565 (2013.01); C23C 16/505 (2013.01);
Abstract
Embodiments of the present disclosure relate to articles, coated articles, and methods of coating such articles with a corrosion resistant coating. The corrosion resistant coating can comprise hafnium aluminum oxide. The corrosion resistant coating may be deposited by a non-line of sight deposition, such as atomic layer deposition. Articles that may be coated may include chamber components, such as gas lines.