The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 01, 2025

Filed:

Aug. 10, 2023
Applicant:

Inficon, Inc., East Syracuse, NY (US);

Inventor:

Eldin Sahbaz, Jamesville, NY (US);

Assignee:

Inficon Inc., East Syracuse, NY (US);

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01J 49/00 (2006.01); G01N 33/00 (2006.01); H01J 49/42 (2006.01);
U.S. Cl.
CPC ...
H01J 49/4215 (2013.01); G01N 33/0006 (2013.01); H01J 49/0036 (2013.01);
Abstract

A method for automatically calibrating a sensor for a residual gas analyzer includes measuring a known sample by the sensor and obtaining data measurements at a first mass unit. A peak model function is fitted to the data to determine an existence of a peak. The peak model function is aligned to the data using dynamic time warping to determine peak features. It is determined whether a position of a peak center and a peak width are within a predetermined tolerance and, if so, the previous steps are performed for a next mass unit. If the position peak center or the peak width at the first mass unit are outside the predetermined tolerance, a sensor parameter is adjusted and another iteration of the calibration is performed. A signal is issued after a maximum number of iterations has been performed and the peak center and width are outside the predetermined tolerance.


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