The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2025
Filed:
Dec. 11, 2023
Applicant:
Entegris, Inc., Billerica, MA (US);
Inventors:
Ying Tang, Brookfield, CT (US);
Joseph R. Despres, Middletown, CT (US);
Joseph D. Sweeney, New Milford, CT (US);
Oleg Byl, Southbury, CT (US);
Barry Lewis Chambers, Hot Springs Village, AR (US);
Assignee:
ENTEGRIS, INC., Billerica, MA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/08 (2006.01); H01J 37/32 (2006.01); H01J 37/317 (2006.01);
U.S. Cl.
CPC ...
H01J 37/08 (2013.01); H01J 37/32532 (2013.01); H01J 37/3171 (2013.01); H01J 2237/31701 (2013.01);
Abstract
Described are ion implantation devices, systems, and methods, and in particular to an ion source that is useful for generating an aluminum ion beam.