The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jul. 01, 2025
Filed:
Apr. 01, 2021
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Rob Johan Theodoor Rutten, Heeze, NL;
Ruud Hendrikus Martinus Johannes Bloks, Helmond, NL;
Alexandrios Mathew, San Diego, CA (US);
Ron Vennix, Bladel, NL;
Assignee:
ASML NETHERLANDS B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/20 (2006.01); G03F 7/00 (2006.01);
U.S. Cl.
CPC ...
G03F 7/706835 (2023.05); G03F 7/706843 (2023.05); G03F 7/7085 (2013.01); G03F 7/70858 (2013.01); G03F 7/70933 (2013.01);
Abstract
A system for measuring a beam. The system includes a measurement device configured to measure the beam and determine a signal based on the measured beam, and a fluid supply device configured to provide fluid as a fluid stream to, or surrounding, the beam. The system is configured to calculate noise of the signal, and to adjust a parameter of the fluid of the fluid stream to reduce the calculated noise.