The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jul. 01, 2025

Filed:

Aug. 09, 2023
Applicant:

Taiwan Semiconductor Manufacturing Company Limited, Hsinchu, TW;

Inventors:

Chi-Wei Chiu, Hsinchu County, TW;

Yung-Long Chen, New Taipei, TW;

Bo-Zhang Chen, Taipei, TW;

Chong-Cheng Su, New Taipei, TW;

Yu-Chun Chen, Hsinchu County, TW;

Ching-Jung Hsu, Hsinchu, TW;

Chi-Tung Lai, Hsinchu, TW;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B24B 37/04 (2012.01); B24B 57/02 (2006.01); H01L 21/306 (2006.01); B01F 23/50 (2022.01);
U.S. Cl.
CPC ...
B24B 37/04 (2013.01); B24B 57/02 (2013.01); H01L 21/30625 (2013.01); B01F 23/56 (2022.01);
Abstract

A slurry blending tool may include a blending tank to receive and blend one or more materials into a slurry, and at least one inlet pipe connected to the blending tank and to provide the one or more materials to the blending tank. The at least one inlet pipe may vertically enter the blending tank and may not contact the blending tank. The slurry blending tool may include a blending pump partially provided within the blending tank and to blend the one or more materials into the slurry. The slurry blending tool may include an outlet pipe connected to the blending pump and to remove the slurry from the blending tank.


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