The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 2025
Filed:
Apr. 06, 2022
Changxin Memory Technologies, Inc., Hefei, CN;
Qinghua Han, Hefei, CN;
CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei, CN;
Abstract
The invention provides a semiconductor structure and a manufacturing method making the semiconductor structure. The method includes: providing a substrate; forming semiconductor pillars on the substrate; forming gate electrodes on the middle sidewalls of the semiconductor pillars; and performing dopant implantation to form source and drain regions. Since the gate-all-around (GAA) gates surrounding the semiconductor pillars are formed first, and the source region and the drain region are formed later by doping implantation, the precise position of the doping implantation can be ensured, thereby improving the fabrication accuracy of the semiconductor structure and improving the performance of the semiconductor structure.