The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 2025
Filed:
May. 13, 2022
Carl Zeiss Multisem Gmbh, Oberkochen, DE;
Stefan Schubert, Oberkochen, DE;
Dieter Schumacher, Gerstetten, DE;
Erik Essers, Aalen, DE;
Ingo Mueller, Aalen, DE;
Arne Thoma, Heidenheim, DE;
Joerg Jacobi, Heidenheim, DE;
Wilhelm Bolsinger, Oberkochen, DE;
Dirk Zeidler, Oberkochen, DE;
Carl Zeiss MultiSEM GmbH, Oberkochen, DE;
Abstract
A particle beam system, such as a multi-beam particle microscope, includes a multi-beam deflection device and a beam stop. The multi-beam deflection device is arranged in the particle-optical beam path downstream of the multi-beam generator and upstream of the beam switch of the particle beam system. The multi-beam deflection device serves collectively blanks a multiplicity of charged individual particle beams. These impinge on a beam stop, which is arranged in the particle-optical beam path level with a site at which a particle beam diameter is reduced or is at a minimum. By way of example, such sites are the cross-over plane of the individual particle beams or an intermediate image plane. Associated methods for operating the particle beam system and associated computer program products are disclosed.