The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 24, 2025

Filed:

Jul. 05, 2022
Applicant:

Carl Zeiss Microscopy Gmbh, Jena, DE;

Inventors:

Martin Ross-Messemer, Essingen, DE;

Ivo Ihrke, Scheuerfeld, DE;

Arian Kriesch, Aalen, DE;

Assignee:
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
H01J 37/244 (2006.01);
U.S. Cl.
CPC ...
H01J 37/244 (2013.01); H01J 2237/2445 (2013.01); H01J 2237/24475 (2013.01);
Abstract

A method for operating a particle beam microscope comprises scanning an object using a particle beam and detecting electrons and x-ray radiation when scanning an object using a particle beam. Improved x-ray radiation information can be generated by combining weighted x-ray radiation information items according to the formula wherein S({right arrow over (r)}) is the detected x-ray radiation intensity assigned to a location {right arrow over (r)}. The following holds true for the weights, for example: wherein I({right arrow over (r)}) represents the intensity of the detected electrons that is assigned to the location {right arrow over (r)}, and σand σare constants.


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