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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12340970 B1

PDFFull Text
Date of Patent:
Jun. 24, 2025

Filed:

May. 13, 2020

Charged particle beam device, and method for controlling charged particle beam device

Applicant:

Hitachi High-tech Corporation, Tokyo, JP;

Inventors:

Shingo Hayashi, Tokyo, JP;

Hideyuki Kazumi, Tokyo, JP;

Zhaohui Cheng, Tokyo, JP;

Hideto Dohi, Tokyo, JP;

Assignee:

HITACHI HIGH-TECH CORPORATION, Tokyo, JP;

Attorney:

Miles & Stockbridge, P.C.

Primary Examiner:

David E Smith

Assistant Examiner:

Hanway Chang

Int. Cl.
CPC ...
H01J 37/141 (2006.01); H01J 37/147 (2006.01); H01J 37/153 (2006.01); H01J 37/28 (2006.01);
U.S. Cl.
CPC ...
H01J 37/141 (2013.01); H01J 37/153 (2013.01); H01J 37/28 (2013.01); H01J 37/1475 (2013.01); H01J 2237/1405 (2013.01); H01J 2237/1532 (2013.01); H01J 2237/2448 (2013.01);
Abstract

The present invention has been made in view of the above problems, and an object thereof is to provide a charged particle beam device capable of improving the reproducibility of the magnetic field response of a magnetic field lens and realizing highly-accurate electron orbit control in a short time. A charged particle beam device according to the present invention generates an excitation current of a magnetic field lens by combining a direct current with an alternating current (see FIG.A).

Find Patent Forward Citations

Hayashi, Shingo. (2025). Charged particle beam device, and method for controlling charged particle beam device (U.S. Patent No. 12340970). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12340970

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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