The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 2025
Filed:
Jun. 02, 2021
Asml Netherlands B.v., Veldhoven, NL;
Victor Sebastiaan Dolk, Eindhoven, NL;
Koos Van Berkel, Waalre, NL;
Mauritius Gerardus Elisabeth Schneiders, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
The invention provides a method for thermo-mechanical control of a heat sensitive element (MI) subject to a heat load, comprising: —providing a non-linear thermo-mechanical model of the heat sensitive element describing a dynamical relationship between characteristics of the heat load and deformation of the heat sensitive element; —calculating a control signal on the basis of an optimization calculation of the non-linear model, —providing an actuation signal to a heater (HE), wherein the actuation signal is at least partially based on the control signal, —heating the heat sensitive element by the heater on the basis of the actuation signal.