The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 2025
Filed:
Nov. 12, 2021
Asml Netherlands B.v., Veldhoven, NL;
Luc Roger Simonne Haspeslagh, Linden, BE;
Nitesh Pandey, Silicon Valley, CA (US);
Ties Wouter Van Der Woord, Eindhoven, NL;
Halil Gökay Yeǧen, Eindhoven, NL;
Guilherme Brondani Torri, Leuven, BE;
Sebastianus Adrianus Goorden, Eindhoven, NL;
Alexander Ludwig Klein, Eindhoven, NL;
Jim Vincent Overkamp, Eindhoven, NL;
Edgar Alberto Osorio Oliveros, Eindhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
A micromirror array comprises a substrate, a plurality of mirrors for reflecting incident light and, for each mirror of the plurality of mirrors, at least one multilayer piezoelectric actuator for displacing the mirror, wherein the at least one multilayer piezoelectric actuator is connected to the substrate, and wherein the at least one multilayer piezoelectric actuator comprises a plurality of piezoelectric layers of piezoelectric material interleaved with a plurality of electrode layers to form a stack of layers. Also disclosed is a method of forming such a micromirror array. The micromirror array may be used in a programmable illuminator. The programmable illuminator may be used in a lithographic apparatus and/or in an inspection and/or metrology apparatus.