The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 2025
Filed:
Feb. 15, 2021
Tdk Corporation, Tokyo, JP;
Masanori Kobayashi, Tokyo, JP;
Ken Unno, Tokyo, JP;
Tetsuya Sasahara, Tokyo, JP;
Kohei Nawaoka, Tokyo, JP;
TDK CORPORATION, Tokyo, JP;
Abstract
[Problem] To provide a pressure sensor that has a plurality of detection parts in a lamination direction, and moreover has improved detection accuracy. [Solution] A pressure sensorhas a membranein which deformation corresponding to pressure occurs, a first gauge layerwhich is formed on the membrane, an intermediate insulation layerwhich is formed on the first gauge layer, and a second gauge layerwhich is formed on the intermediate insulation layer. The first gauge layerand the second gauge layerrespectively include a first detection partand a second detection partwhich detect the deformation of the membrane. The distance from the surface of the membraneto the second detection partis no more than 30 μm.