The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 24, 2025
Filed:
Dec. 16, 2019
Nuflare Technology, Inc., Kanagawa, JP;
Yoshitaka Ishikawa, Yokohama, JP;
Takehiko Kobayashi, Shizuoka, JP;
Hideshi Takahashi, Yokohama, JP;
Yasushi Iyechika, Chiba, JP;
Takashi Haraguchi, Fujisawa, JP;
Kiyotaka Miyano, Tokyo, JP;
NuFlare Technology, Inc., Kanagawa, JP;
Abstract
A vapor phase growth apparatus according to an embodiment includes a reaction chamber, a holder provided in the reaction chamber, the holder holding a substrate, a heater heating the substrate, a first reflector facing the holder, the heater being interposed between the first reflector and the holder, a second reflector provided between the first reflector and the heater, the second reflector having a compressive strength or a bending strength equal to or less than 1000 MPa or a Vickers hardness equal to or less than 8 GPa, the second reflector having a pattern, and a rotating shaft fixed to the holder, the rotating shaft rotating the holder.