The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2025
Filed:
Aug. 12, 2020
Applicant:
Tokyo Electron Limited, Tokyo, JP;
Inventors:
Hiroshi Ogino, Sapporo, JP;
Masanori Saito, Sapporo, JP;
Noriaki Kanaya, Sapporo, JP;
Yasuhiro Tsuruma, Sapporo, JP;
Assignee:
TOKYO ELECTRON LIMITED, Tokyo, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G05B 19/4099 (2006.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G05B 19/4099 (2013.01); G05B 2219/45031 (2013.01); H01L 21/67167 (2013.01);
Abstract
A reception unit receives a processing instruction including a recipe. A calculation unit calculates an identifier from the recipe received by the receiving unit. A determination unit determines whether an identical identifier to the calculated identifier is stored in a memory. A control unit controls a substrate processing apparatus using an operation data item associated with the identical identifier and the recipe received by the receiving unit when the determination unit determines that the identical identifier is stored in the memory.