The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 17, 2025
Filed:
Apr. 11, 2023
Lam Research Corporation, Fremont, CA (US);
Jan Matthijn Dekkers, Aadorp, NL;
Kristiaan Hendrikus Aloysius Bohm, Deventer, NL;
Willem Cornelis Lambert Hopman, Deventer, NL;
Jeroen Aaldert Heuver, Enschede, NL;
Jan Arnaud Janssens, Schalkhaar, NL;
LAM RESEARH CORPORATION, Fremont, CA (US);
Abstract
A filter for a pulsed laser deposition device includes a housing with two pass-through openings arranged in the housing wall and forming a pass-through channel for passing at least part of the plasma plume through the housing, which pass-through channel extends from one side of the housing to an opposite side of the housing, at least one primary blade arranged at a distance from and rotatable around a rotation axis, with the path of the at least one primary blade intersecting with the pass-through channel and with the at least one primary blade having a contact surface for contact with the plasma plume, and a drain channel connecting to a drain opening arranged in the housing wall.