The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2025
Filed:
Aug. 10, 2023
Applicant:
Gigaphoton Inc., Tochigi, JP;
Inventors:
Junichi Fujimoto, Oyama, JP;
Takahiro Tatsumi, Oyama, JP;
Kazuki Nagai, Oyama, JP;
Jeffrey P. Sercel, Manchester, NH (US);
Assignee:
Gigaphoton Inc., Tochigi, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01S 3/03 (2006.01); G03F 7/00 (2006.01); H01S 3/04 (2006.01); H01S 3/041 (2006.01);
U.S. Cl.
CPC ...
H01S 3/03 (2013.01); G03F 7/70025 (2013.01); G03F 7/70891 (2013.01); H01S 3/0405 (2013.01); H01S 3/0407 (2013.01); H01S 3/041 (2013.01);
Abstract
A chamber device includes an inner housing including a passage port through which light generated by excitation of laser gas at an internal space thereof passes, an outer housing surrounding at least a part of the inner housing from a lateral side of a travel direction of the light, and a partition wall arranged between the inner housing and the outer housing and fixed to the inner housing and the outer housing.