The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2025
Filed:
Mar. 18, 2022
Korea Electronics Technology Institute, Seongnam-si, KR;
Hyeong Keun Kim, Yongin-si, KR;
Seul Gi Kim, Yongin-si, KR;
Hyun Mi Kim, Seoul, KR;
Jin Woo Cho, Seoul, KR;
Yong Kyung Kim, Gwangju-si, KR;
KOREA ELECTRONICS TECHNOLOGY INSTITUTE, Seongnam-si, KR;
Abstract
A pellicle for extreme ultraviolet lithography containing molybdenum carbide is disclosed. The pellicle includes a substrate having an opening formed in a central portion, and a pellicle layer formed on the substrate to cover the opening and including a molybdenum carbide containing layer that contains molybdenum carbide expressed as MoC(0<x<1). The pellicle layer includes a core layer formed on the substrate to cover the opening, and the core layer may be the molybdenum carbide containing layer.