The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2025
Filed:
Sep. 27, 2021
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Reinier Theodorus Martinus Jilisen, Eindhoven, NL;
Maarten Jan Heerkens, Waalre, NL;
Hendrikus Petrus Kluijtmans, Asten, NL;
Robbert Willem Frederik Oosterbaan, Valkenswaard, NL;
Antonius Marinus Coenraad Petrus Leonardus Van De Kerkhof, Handel, NL;
Assignee:
ASML NETHERLANDS B.V., Veldhoven, NL;
Primary Examiner:
Int. Cl.
CPC ...
G01N 33/00 (2006.01); G01N 27/64 (2006.01);
U.S. Cl.
CPC ...
G01N 33/0006 (2013.01); G01N 27/64 (2013.01);
Abstract
Disclosed herein is a residual gas analyser for detecting gas in a vacuum tool, the residual gas analyser comprising: one or more ion sources configured to ionise a gas in the residual gas analyser; one or more detectors configured to detect an ionised gas by the ion source; and one or more gas generating filaments configured to generate gas within the residual gas analyser.