The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 10, 2025
Filed:
Mar. 20, 2023
Applicant:
United Microelectronics Corp., Hsinchu, TW;
Inventors:
Chih-Chieh Tsai, Kaohsiung, TW;
Yi-Wei Chen, Taichung, TW;
Assignee:
UNITED MICROELECTRONICS CORP, Hsinchu, TW;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B08B 7/00 (2006.01); H01L 21/67 (2006.01); H01L 23/29 (2006.01);
U.S. Cl.
CPC ...
B08B 7/0014 (2013.01); B08B 7/0028 (2013.01); H01L 21/67288 (2013.01); H01L 23/293 (2013.01);
Abstract
A monitor wafer is provided. The monitor wafer includes a substrate and a cleaning layer. The cleaning layer is disposed on a bottom surface of the substrate. The cleaning layer is configured to remove particles from the substrate and/or a processing tool.