The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
Jun. 10, 2025

Filed:

Jun. 28, 2022
Applicant:

Canon Kabushiki Kaisha, Tokyo, JP;

Inventors:

Niyaz Khusnatdinov, Round Rock, TX (US);

Weijun Liu, Cedar Park, TX (US);

James W. Irving, Austin, TX (US);

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
B32B 7/022 (2019.01); B05D 1/00 (2006.01); B05D 1/36 (2006.01); B05D 1/38 (2006.01); B05D 3/06 (2006.01); B05D 5/00 (2006.01); B05D 5/08 (2006.01); B32B 27/08 (2006.01); B32B 27/30 (2006.01); B32B 33/00 (2006.01); G03F 7/00 (2006.01); H01L 21/3105 (2006.01); B05D 3/02 (2006.01); B32B 27/06 (2006.01); B82Y 40/00 (2011.01);
U.S. Cl.
CPC ...
B05D 1/36 (2013.01); B05D 1/005 (2013.01); B05D 1/38 (2013.01); B05D 3/06 (2013.01); B05D 5/00 (2013.01); B32B 7/022 (2019.01); B32B 27/308 (2013.01); B32B 33/00 (2013.01); G03F 7/0002 (2013.01); H01L 21/31058 (2013.01); B05D 3/02 (2013.01); B05D 3/067 (2013.01); B05D 3/068 (2013.01); B05D 5/08 (2013.01); B05D 5/086 (2013.01); B05D 2502/00 (2013.01); B05D 2506/10 (2013.01); B32B 27/06 (2013.01); B32B 27/08 (2013.01); B32B 2255/24 (2013.01); B32B 2255/26 (2013.01); B32B 2255/28 (2013.01); B32B 2305/72 (2013.01); B32B 2305/77 (2013.01); B32B 2307/538 (2013.01); B32B 2307/7376 (2023.05); B32B 2307/748 (2013.01); B32B 2310/0837 (2013.01); B32B 2333/04 (2013.01); B32B 2333/08 (2013.01); B32B 2333/12 (2013.01); B82Y 40/00 (2013.01); H01L 21/31051 (2013.01); Y10T 428/24355 (2015.01); Y10T 428/24364 (2015.01); Y10T 428/24942 (2015.01); Y10T 428/265 (2015.01); Y10T 428/269 (2015.01); Y10T 428/31 (2015.01);
Abstract

A superstrate can include a body, a first layer, and a second layer, wherein the first layer is disposed between the body and the second layer. Each of the first and second layers has a proximal surface and a distal surface opposite the proximal surface, wherein the body is closer to the proximal surface than to the distal surface. An Ra of the distal surface of the second layer is less than an Ra of the distal surface of the first layer. In a method of making the superstrate, the relatively high Ra of the distal surface of the first layer may be related to the process or equipment used in forming the first layer. The second layer can be formed using another superstrate, where the Ra of the distal surface of the second layer is substantially the same as the contact surface of the other superstrate.


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