The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2025
Filed:
Sep. 19, 2022
Fortemedia, Inc., Santa Clara, CA (US);
Chih-Yuan Chen, Tainan, TW;
Feng-Chia Hsu, Tainan, TW;
Chun-Kai Mao, Tainan, TW;
Jien-Ming Chen, Tainan, TW;
Wen-Shan Lin, Tainan, TW;
Nai-Hao Kuo, Tainan, TW;
FORTEMEDIA, INC., Alviso, CA (US);
Abstract
A MEMS structure is provided. The MEMS structure includes a substrate having an opening portion and a backplate disposed on one side of the substrate and having acoustic holes. The MEMS structure also includes a diaphragm disposed between the substrate and the backplate and extending across the opening portion of the substrate. The diaphragm includes a ventilation hole, and an air gap is formed between the diaphragm and the backplate. The MEMS structure further includes a protrusion extending into the air gap.