The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2025
Filed:
Dec. 21, 2021
Applicant:
Entegris, Inc., Billerica, MA (US);
Inventors:
Chandra Venkatraman, Tyngsboro, MA (US);
Scott Sirignano, Azle, TX (US);
Yan Liu, Lexington, MA (US);
Subhash Guddati, Singapore, SG;
Thines Kumar Perumal, Singapore, SG;
Montray Leavy, Singapore, SG;
Jakub Rybczynski, Arlington, MA (US);
Carlo Waldfried, Middleton, MA (US);
Assignee:
ENTEGRIS, INC., Billerica, MA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01T 23/00 (2006.01); H01L 21/683 (2006.01); B22F 10/28 (2021.01); H02N 13/00 (2006.01);
U.S. Cl.
CPC ...
H01L 21/6833 (2013.01); B22F 10/28 (2021.01); H02N 13/00 (2013.01);
Abstract
Described are electrostatic chucks that are useful to support a workpiece during a step of processing the workpiece, and electrostatic chuck base components prepared by an additive manufacturing technique.