The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2025
Filed:
Apr. 27, 2023
Screen Holdings Co., Ltd., Kyoto, JP;
Koji Nishiyama, Kyoto, JP;
SCREEN HOLDINGS CO., LTD., , JP;
Abstract
A substrate cleaning method includes holding and rotating a substrate by a rotation holder and cleaning a back surface of the substrate held by the rotation holder. The holding and rotating the substrate includes holding the substrate by a holder provided at a rotator and rotating the rotator about a rotation axis. The cleaning includes moving a cleaning tool by a mover while pressing the cleaning tool against the back surface of the substrate held by the holder, removing foreign matter on the back surface of the substrate by polishing with the cleaning tool, and further cleaning the back surface of the substrate, which has been cleaned or is being cleaned by the cleaning tool, by a cleaning brush.