The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
Jun. 03, 2025
Filed:
May. 21, 2020
Applicant:
Versum Materials Us, Llc, Tempe, AZ (US);
Inventors:
Chandra Haripin, San Marcos, CA (US);
Xinjian Lei, Vista, CA (US);
Assignee:
Versum Materials US, LLC, Tempe, AZ (US);
Attorneys:
Primary Examiner:
Int. Cl.
CPC ...
C23C 16/455 (2006.01); C23C 16/40 (2006.01); C23C 16/44 (2006.01);
U.S. Cl.
CPC ...
C23C 16/45527 (2013.01); C23C 16/402 (2013.01); C23C 16/4408 (2013.01);
Abstract
A composition is used in a process for depositing a silicon oxide film or a carbon doped silicon oxide film using a deposition process, wherein the composition includes at least one silicon precursor having a structure represented by Formula I as described herein