The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 27, 2025

Filed:

Aug. 23, 2022
Applicant:

Xiamen Sanan Integrated Circuit Co., Ltd., Xiamen, CN;

Inventors:

Shenghou Liu, Xiamen, CN;

Wenbi Cai, Xiamen, CN;

Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10D 62/85 (2025.01); H01L 21/24 (2006.01); H01L 21/285 (2006.01); H10D 64/62 (2025.01);
U.S. Cl.
CPC ...
H10D 62/8503 (2025.01); H01L 21/246 (2013.01); H01L 21/28575 (2013.01); H10D 62/85 (2025.01); H10D 64/62 (2025.01);
Abstract

A GaN-based compound semiconductor device includes a GaN-based epitaxial structure and an annealed metal layered structure that is formed on the GaN-based epitaxial structure. The annealed metal layered structure includes a metallic barrier layer, a conductive unit, and a protective unit which is formed on a lateral surface of the conductive unit. The metallic barrier layer and the conductive unit are sequentially disposed on the GaN-based epitaxial structure in such order. An ohmic contact is formed between the GaN-based epitaxial structure and the annealed metal layered structure. The protective unit includes a metal oxide material having one of NiAlO, AuAlO, and a combination thereof.


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