The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2025
Filed:
Oct. 28, 2021
Changxin Memory Technologies, Inc., Hefei, CN;
Ping-Heng Wu, Hefei, CN;
CHANGXIN MEMORY TECHNOLOGIES, INC., Hefei, CN;
Abstract
The present disclosure provides a semiconductor device, a semiconductor structure and a formation method thereof, and relates to the field of semiconductor technologies. The formation method includes: providing a substrate, and forming a sacrificial layer on the substrate; patterning the sacrificial layer to form trenches and through holes distributed side by side in the sacrificial layer; forming insulating layers covering a sidewall of the trench and a sidewall of the through hole; sequentially forming a conductive layer and a passivation layer in the trench and the through hole to form a bitline structure in the trench; and removing the passivation layer in the through hole to form a capacitor contact structure in the through hole.