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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12315751 B1

PDFFull Text
Date of Patent:
May. 27, 2025

Filed:

Nov. 19, 2021

System for a semiconductor fabrication facility and method for operating the same

Applicant:

Taiwan Semiconductor Manufacturing Company Ltd., Hsinchu, TW;

Inventors:

Fu-Hsien Li, Taichung, TW;

Chi-Feng Tung, Miaoli County, TW;

Hsiang Yin Shen, Hsinchu, TW;

Assignee:

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY LTD., Hsinchu, TW;

Attorneys:

WPAT LAW

Anthony King

Primary Examiner:

David Redding

Int. Cl.
CPC ...
H01L 21/677 (2006.01); A47L 7/00 (2006.01); A47L 9/28 (2006.01);
U.S. Cl.
CPC ...
H01L 21/67733 (2013.01); A47L 7/009 (2013.01); A47L 9/2805 (2013.01); A47L 9/2836 (2013.01); H01L 21/67724 (2013.01); H01L 21/67727 (2013.01);
Abstract

An automatic cleaning unit for AMHS includes a plurality of sensors disposed on OHT rails. The sensors are configured to define a cleaning zone and to detect a location of an OHT vehicle. The automatic cleaning unit further includes a vacuum generator and a top cleaning part installed over the OHT rails in the cleaning zone. The top cleaning part is coupled to the vacuum generator. The vacuum generator is turned on to perform a vacuum cleaning operation when the sensors detect the OHT vehicle entering the cleaning zone.

Find Patent Forward Citations

Li, Fu-Hsien. (2025). System for a semiconductor fabrication facility and method for operating the same (U.S. Patent No. 12315751). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12315751

Data source: USPTO (United States Patent and Trademark Office) public patent records. Weekly synchronization. How IDiyas builds this profile

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