The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2025
Filed:
May. 24, 2023
Water replenishment control method for semiconductor process device and semiconductor process device
Beijing Naura Microelectronics Equipment Co., Ltd., Beijing, CN;
Kaiyue Cao, Beijing, CN;
Fei Gao, Beijing, CN;
Yang Wang, Beijing, CN;
Fan Li, Beijing, CN;
Hao Yang, Beijing, CN;
Zhe Yang, Beijing, CN;
Zhihao Ren, Beijing, CN;
Qiang Zhang, Beijing, CN;
BEIJING NAURA MICROELECTRONICS EQUIPMENT CO., LTD., Beijing, CN;
Abstract
A water supply control method includes: obtaining water supply time period information that each of the plurality of furnace tubes needs to reserve; according to the water supply time period information that each of the plurality of furnace tubes needs to reserve, updating a reservation queue at a current moment; and according to the water supply time period information in the updated reservation queue, setting the liquid evaporator to be in an available state or an unavailable state for each of the plurality of furnace tubes, such that the liquid evaporator supplies water to only one furnace tube at a time.