The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2025
Filed:
Feb. 25, 2019
Applicant:
Asml Netherlands B.v., Veldhoven, NL;
Inventors:
Alexey Olegovich Polyakov, Veldhoven, NL;
Erwin Paul Smakman, Veldhoven, NL;
Andrey Nikipelov, Veldhoven, NL;
Albertus Victor Gerardus Mangnus, Veldhoven, NL;
Assignee:
ASML NETHERLANDS B.V., Veldhoven, NL;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); G01N 23/2251 (2018.01); H01L 21/67 (2006.01);
U.S. Cl.
CPC ...
G03F 7/7065 (2013.01); G01N 23/2251 (2013.01); G03F 7/70808 (2013.01); G03F 7/7085 (2013.01); H01L 21/67213 (2013.01); H01L 21/67288 (2013.01);
Abstract
An inspection system that include a selective deposition tool configured to receive a sample and selectively deposit a material onto the sample, an inspection tool configured to perform an inspection process on the sample provided with the deposited material, and an enclosure configured to enclose the selective deposition tool and the inspection tool.