The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 27, 2025
Filed:
Aug. 23, 2024
Harbin Institute of Technology, Harbin, CN;
HARBIN INSTITUTE OF TECHNOLOGY, Harbin, CN;
Abstract
This application relates to optical precision measurement and provides a dark-field confocal microscopy measurement apparatus based on vortex interference. A vortex light generation module is configured to generate vortex light with a predetermined order. A vortex light interference module is configured to: divide the vortex light into reference light and imaging light, direct the imaging light to irradiate a scanning position of a to-be-measured sample, to obtain sample reflection light of the scanning position, and enable the reference light and the sample reflection light to overlap and interfere with each other to obtain interference light. A rotation demodulation module is configured to perform rotation demodulation on the interference light, to obtain amplitude and phase information of the scanning position, so as to characterize the amplitude and phase information of defects and realize detection of phase-type defects.