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The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Patent No.:

US 12310067 B1

PDFFull Text
Date of Patent:
May. 20, 2025

Filed:

Aug. 30, 2021

Multigate device with stressor layers and method of fabricating thereof

Applicant:

Taiwan Semiconductor Manufacturing Company, Ltd., Hsinchu, TW;

Inventor:

Ka-Hing Fung, Hsinchu County, TW;

Assignee:

TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD., Hsinchu, TW;

Attorney:

Haynes and Boone, LLP

Primary Examiner:

Suberr L Chi

Assistant Examiner:

Carnell Hunter, Iii

Int. Cl.
CPC ...
H10D 30/69 (2025.01); H01L 21/02 (2006.01); H10D 30/01 (2025.01); H10D 30/67 (2025.01); H10D 62/10 (2025.01); H10D 84/01 (2025.01); H10D 84/03 (2025.01); H10D 84/85 (2025.01);
U.S. Cl.
CPC ...
H10D 30/795 (2025.01); H01L 21/0259 (2013.01); H10D 30/031 (2025.01); H10D 30/6735 (2025.01); H10D 30/6757 (2025.01); H10D 62/118 (2025.01); H10D 84/0167 (2025.01); H10D 84/0188 (2025.01); H10D 84/038 (2025.01); H10D 84/85 (2025.01);
Abstract

Methods and devices of providing tensile/compressive stressor layers for gate-all-around devices. A first GAA device and a second GAA are disposed having a shallow trench isolation feature and one of more stressor layers between gate structures of the first GAA device and the second GAA. The stressor layers can provide tensile stress to a channel layer of the first GAA device and a compressive stress to another channel layer of the second GAA device.

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Quick Actions:

Fung, Ka-Hing. (2025). Multigate device with stressor layers and method of fabricating thereof (U.S. Patent No. 12310067). U.S. Patent and Trademark Office. https://idiyas.com/patent/badge/12310067

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