The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2025
Filed:
Jan. 14, 2022
Canon Anelva Corporation, Kawasaki, JP;
Jun Miura, Hachioji, JP;
Naoya Fukuda, Chofu, JP;
Shuji Kumagai, Tama, JP;
Shinji Takagi, Tama, JP;
Tetsuro Toda, Machida, JP;
Hidetoshi Shimokawa, Fuchu, JP;
Satoshi Negishi, Hachioji, JP;
Satoshi Nomura, Tama, JP;
Junya Soeda, Yokohama, JP;
Canon Anelva Corporation, Kawasaki, JP;
Abstract
A load lock device includes a load lock chamber including a first conveyance port connected to a transfer chamber connected to a reduced-pressure processing device, and a second conveyance port connected to a loader chamber; a substrate holder configured to hold a substrate in the load lock chamber; a driving mechanism arranged below the load lock chamber to move the substrate holder up and down and connected to the substrate holder via a connecting member; an extension chamber extended from a lower portion of the load lock chamber to a side; and a pump arranged below the extension chamber and configured to discharge a gas in the load lock chamber via the extension chamber. The extension chamber includes a bottom surface with an opening at a position deviated from a vertically lower position of the substrate holder, and the pump is connected to the opening.