The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.

The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.

Date of Patent:
May. 20, 2025

Filed:

Nov. 09, 2021
Applicant:

Mitsubishi Electric Corporation, Tokyo, JP;

Inventor:

Katsumi Nakamura, Tokyo, JP;

Assignee:
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H10D 8/50 (2025.01); H01L 21/22 (2006.01); H10D 12/00 (2025.01); H10D 62/10 (2025.01); H10D 62/17 (2025.01); H10D 62/53 (2025.01); H10D 64/00 (2025.01); H10D 84/60 (2025.01);
U.S. Cl.
CPC ...
H01L 21/221 (2013.01); H10D 8/50 (2025.01); H10D 12/481 (2025.01); H10D 62/107 (2025.01); H10D 62/393 (2025.01); H10D 62/53 (2025.01); H10D 64/111 (2025.01); H10D 84/617 (2025.01);
Abstract

A semiconductor device according to the present disclosure includes: a semiconductor substrate with a first main surface and a second main surface; a drift layer of a first conductivity type formed in the semiconductor substrate; a first impurity diffusion layer of a second conductivity type formed on the drift layer to be closer to the first main surface; and a buffer layer of the first conductivity type formed on the drift layer to be closer to the second main surface and higher in peak impurity concentration than the drift layer. The drift layer has a first trap, a second trap, and a third trap, whose energy level each is lower than energy at a bottom of a conduction band by 0.246 eV, 0.349 eV, and 0.470 eV. The second trap has trap density of equal to or greater than 2.0×10cm.


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