The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2025
Filed:
Jan. 19, 2021
Fujikin Incorporated, Osaka, JP;
Katsuyuki Sugita, Osaka, JP;
Kouji Nishino, Osaka, JP;
Kaoru Hirata, Osaka, JP;
Shinya Ogawa, Osaka, JP;
Keisuke Ideguchi, Osaka, JP;
FUJIKIN INCORPORATED, Osaka, JP;
Abstract
A flow rate control device () includes a control valve () having a valve element and a piezoelectric element for moving the valve element, and an arithmetic processing circuit () for controlling an operation of the control valve, wherein the arithmetic processing circuit is configured to receive an external command signal SE corresponding to a target flow rate when opening the control valve from a closed state so that a gas flows at the target flow rate, and to generate an internal command signal Eoutput to a driving circuit for determining a voltage applied to the piezoelectric element based on the external command signal, the internal command signal is a signal that rises with time from zero and converges to a value of the external command signal, and is generated such that a slope at the time of initial rise and a slope immediately before convergence are smaller than a slope therebetween.