The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2025
Filed:
Jan. 11, 2023
Tokyo Electron Limited, Tokyo, JP;
Takahiro Yamaguchi, Koshi, JP;
TOKYO ELECTRON LIMITED, Tokyo, JP;
Abstract
A substrate inspection apparatus configured to inspect a substrate by using an image of a surface of the substrate includes a holder configured to hold the substrate; a first light source unit configured to emit visible light to the substrate; a second light source unit configured to emit ultraviolet light to the substrate; a first imaging sensor configured to perform capturing of a visible light image of the substrate by receiving reflected light from the substrate; a second imaging sensor configured to perform capturing of an ultraviolet light image of the substrate by receiving reflected light or scattered light from the substrate; and a controller configured to acquire the visible light image from the first imaging sensor and the ultraviolet light image from the second imaging sensor. The visible light image and the ultraviolet light image are images obtained by imaging a common region of the substrate.