The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2025
Filed:
Nov. 09, 2021
Applicant:
Applied Materials, Inc., Santa Clara, CA (US);
Inventors:
Muhannad Mustafa, Milpitas, CA (US);
Mario D. Silvetti, Fountain Hills, AZ (US);
Mandyam Sriram, San Jose, CA (US);
Sanjeev Baluja, Campbell, CA (US);
Assignee:
Applied Materials, Inc., Santa Clara, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
F28F 3/12 (2006.01); C23C 16/46 (2006.01); F28F 21/08 (2006.01);
U.S. Cl.
CPC ...
C23C 16/46 (2013.01); F28F 3/12 (2013.01); F28F 21/083 (2013.01); F28F 21/084 (2013.01); F28F 2225/00 (2013.01);
Abstract
Pedestal heater radiators, pedestal assemblies including the pedestal heater radiators and methods of decreasing deposition non-uniformity are described. The pedestal heater radiator has a first radiator body and a second radiator body with different emissivities. The first radiator body and second radiator body are sized and positioned to decrease the heat loss differential between sides of the pedestal.