The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 20, 2025
Filed:
Apr. 02, 2019
Asmpt Singapore Pte. Ltd., Singapore, SG;
Paul Verburg, Nijmegen, NL;
ASMPT SINGAPORE PTE. LTD., , SG;
Abstract
A method of cutting a wafer by irradiating the wafer with laser energy, comprises emitting a sequence of successive laser beam pulses having a first set of laser beam pulses and a second set of laser beam pulses, the first set of laser beam pulses comprising: laser beam pulses having respective pulse widths in the range from 0.1 to 300 nanoseconds, or a plurality of bursts of laser beam pulses having an inter-burst spacing in the range from 0.1 to 100 nanoseconds, each pulse within the bursts having a pulse width of 100 picoseconds or less, and the second set of laser beam pulses comprising laser beam pulses having pulse widths of 100 picoseconds or less.