The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2025
Filed:
Aug. 19, 2022
Winbond Electronics Corp., Taichung, TW;
Hao-Chuan Chang, Taichung, TW;
WINBOND ELECTRONICS CORP., Taichung, TW;
Abstract
A semiconductor memory structure includes a semiconductor substrate, a bit line disposed on the semiconductor substrate, a dielectric liner disposed on a sidewall of the bit line and a capacitor contact disposed on a side of the bit line. The dielectric liner includes a first nitride liner disposed on a sidewall of the bit line, an oxide liner disposed on a sidewall of the first nitride liner, and a second nitride liner disposed on a sidewall of the oxide liner. The capacitor contact includes a semiconductor plug disposed on the semiconductor substrate, a metal plug disposed on the semiconductor plug, a metal silicide liner including a sidewall portion and a bottom portion extending along the sidewall and the bottom of the metal plug respectively, and a nitride layer disposed on the metal silicide liner. The sidewall portion is disposed directly above the second nitride liner.