The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2025
Filed:
Oct. 27, 2020
Applicant:
Cymer, Llc, San Diego, CA (US);
Inventors:
Rabin Paudel, Portland, OR (US);
Eric Anders Mason, San Diego, CA (US);
Gamaralalage G. Padmabandu, San Diego, CA (US);
John Theodore Melchior, San Diego, CA (US);
Assignee:
Cymer, LLC, San Diego, CA (US);
Attorney:
Primary Examiner:
Assistant Examiner:
Int. Cl.
CPC ...
G03F 7/00 (2006.01); H01S 3/00 (2006.01); H01S 3/225 (2006.01); H01S 3/23 (2006.01);
U.S. Cl.
CPC ...
G03F 7/7005 (2013.01); G03F 7/70025 (2013.01); G03F 7/70041 (2013.01); H01S 3/0071 (2013.01); H01S 3/225 (2013.01); H01S 3/2391 (2013.01);
Abstract
Apparatus for and methods of combining multiple, i.e., two or more laser beams to reduce even to the point of elimination a transverse gap between the two or more beams caused, for example, by a space between a coating on a surface of the mirror and the edge of the mirror, or by optic geometry, is avoided.