The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2025
Filed:
Aug. 18, 2021
Oxford Instruments Asylum Research, Inc., Santa Barbara, CA (US);
Centre National DE LA Recherche Scientifique, Paris, FR;
École Normale Supérieure DE Lyon, Lyons, FR;
Universite Claude Bernard Lyon 1, Villeurbanne, FR;
Aleks Labuda, Santa Barbara, CA (US);
Basile Pottier, Lyons, FR;
Ludovic Bellon, Le Bois-d'Oingt, FR;
Oxford Instruments Asylum Research, Inc., Goleta, CA (US);
Ecole Normale Suérieure de Lyon, Lyons, FR;
Université Claude Bernanrd Lyon 1, Lyons, FR;
Centre National de la Recherche Scientifique, Paris, FR;
Abstract
An atomic force microscope ('AFM') based interferometer, uses a light source, and a splitting optical interface, splitting the light beam into a signal light beam and a reference light beam. Both the signal and reference light beams are focused in the vicinity of an AFM cantilever. A beam displacer introduces a lateral displacement between the signal light beam and reference light beam, the lateral displacement being such that, in at least one plane between the beam displacer and the focusing lens structure, the center of the signal light beam is separated from the center of the reference light beam by more than half a sum of their beam diameters on that plane. A detector operates to determine differences in optical path length between the signal light beam and reference light beam to determine information about movement of the cantilever.