The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 13, 2025
Filed:
Jun. 02, 2022
Disco Corporation, Tokyo, JP;
DISCO CORPORATION, Tokyo, JP;
Abstract
An operation accuracy measuring method for measuring the operation accuracy of a linear motion mechanism includes the steps of placing on a support table a measuring jig having a flat lower surface, a parallel surface opposite and parallel to the lower surface, and a slanted surface joined to the parallel surface through a straight boundary line, adjusting the position of the measuring jig to allow the white light interferometer to observe the parallel surface and the slanted surface simultaneously, capturing images of the parallel surface and the slanted surface with the white light interferometer and observing changes in interference fringes appearing in image sections of the captured images that represent the parallel surface and the slanted surface while the support table is being linearly moved, and the step of deducing the operation accuracy of the linear motion mechanism on the basis of the observed changes in the interference fringes.