The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2025
Filed:
Jun. 17, 2022
Applicant:
Amkor Technology Japan, Inc., Oita, JP;
Inventors:
Shojiro Hanada, Kanagawa, JP;
Shingo Nakamura, Kanagawa, JP;
Assignee:
Amkor Technology Japan, Inc., Oita, JP;
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
H01L 23/10 (2005.12); F16K 99/00 (2005.12); H01L 21/54 (2005.12); H01L 23/00 (2005.12); H01L 23/13 (2005.12); H01L 23/20 (2005.12); H01L 23/498 (2005.12);
U.S. Cl.
CPC ...
H01L 23/10 (2012.12); H01L 21/54 (2012.12); H01L 23/13 (2012.12); H01L 23/20 (2012.12); F16K 99/0005 (2012.12); F16K 99/0023 (2012.12); F16K 99/0032 (2012.12); F16K 99/0036 (2012.12); H01L 23/49827 (2012.12); H01L 23/49838 (2012.12); H01L 24/48 (2012.12); H01L 2224/48091 (2012.12); H01L 2224/48106 (2012.12); H01L 2224/48229 (2012.12);
Abstract
In one example, a semiconductor device comprises a cavity substrate comprising a base and a sidewall to define a cavity, an electronic component on a top side of the base in the cavity, a lid over the cavity and over the sidewall, and a valve to provide access to the cavity, wherein the valve has a plug to provide a seal between a cavity environment and an exterior environment outside the cavity. Other examples and related methods are also disclosed herein.