The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2025
Filed:
Apr. 30, 2021
Asml Netherlands B.v., Veldhoven, NL;
José Nilton Fonseca Junior, Hamburg, DE;
Franciscus Johannes Leonardus Heutz, Dommelen, NL;
Zhuangxiong Huang, Eindhoven, NL;
Ferdy Migchelbrink, Veldhoven, NL;
ASML Netherlands B.V., Veldhoven, NL;
Abstract
The present invention provides a fluid purging system () for an optical element (), comprising a ring and a fluid supply system (). The ring being formed of a body entirely surrounding the optical element, the ring defining a space () radially inwards thereof and adjacent to the optical element. The ring is formed by at least one first wall portion () and at least one second wall portion (A;B), wherein an average height of the first wall portion is greater than an average height of the second wall portion. The fluid supply system is positioned radially outwards of the ring and configured to supply fluid to pass over the at least one second wall portion to the space.