The patent badge is an abbreviated version of the USPTO patent document. The patent badge does contain a link to the full patent document.
The patent badge is an abbreviated version of the USPTO patent document. The patent badge covers the following: Patent number, Date patent was issued, Date patent was filed, Title of the patent, Applicant, Inventor, Assignee, Attorney firm, Primary examiner, Assistant examiner, CPCs, and Abstract. The patent badge does contain a link to the full patent document (in Adobe Acrobat format, aka pdf). To download or print any patent click here.
Patent No.:
Date of Patent:
May. 06, 2025
Filed:
Sep. 05, 2024
Applicant:
Aehr Test Systems, Fremont, CA (US);
Inventors:
Jovan Jovanovic, Santa Clara, CA (US);
Kenneth W. Deboe, Santa Clara, CA (US);
Steven C. Steps, Saratoga, CA (US);
Assignee:
AEHR TEST SYSTEMS, Fremont, CA (US);
Attorney:
Primary Examiner:
Int. Cl.
CPC ...
G01R 31/50 (2019.12); G01R 1/04 (2005.12); G01R 31/00 (2005.12); G01R 31/26 (2019.12); G01R 31/28 (2005.12); H01L 21/324 (2005.12); H01L 21/66 (2005.12); H01L 21/67 (2005.12); H01L 21/687 (2005.12);
U.S. Cl.
CPC ...
G01R 31/50 (2019.12); G01R 1/0491 (2012.12); G01R 31/003 (2012.12); G01R 31/2831 (2012.12); G01R 31/2875 (2012.12); H01L 21/324 (2012.12); H01L 21/67103 (2012.12); H01L 21/67109 (2012.12); H01L 21/67248 (2012.12); H01L 21/68785 (2012.12); H01L 22/26 (2012.12);
Abstract
A tester apparatus is provided. Slot assemblies are removably mounted to a frame. Each slot assembly allows for individual heating and temperature control of a respective cartridge that is inserted into the slot assembly. A closed loop air path is defined by the frame and a heater and cooler are located in the closed loop air path to cool or heat the cartridge with air. Individual cartridges can be inserted or be removed while other cartridges are in various stages of being tested or in various stages of temperature ramps.